Paper: Mined from Scientific Literature — Process Schemas for Atomic Layer Deposition and Etching

Summary

This forum post shares an arXiv paper (2609.12139) presenting four domain-expert-reviewed JSON Schemas for atomic layer deposition (ALD) and atomic layer etching (ALE) processes, covering both experimental and simulation workflows. ALD and ALE processes are reported inconsistently across materials science literature, hindering comparison and machine-actionable reuse. The schemas were curated with schema-miner and grounded in QUDT units using schema-miner pro, structuring materials, process conditions, configurations, and measured or predicted results. The authors compare the schemas' scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates. Authors include Sameer Sadruddin, Eleni Poupaki, Alex Watkins, Bora Karasulu, Adriaan J. M. Mackus, Erwin Kessels, Sören Auer, and Jennifer D'Souza.