[论文] Mined from Scientific Literature: Process Schemas for Atomic Layer Dep...
研究领域: ML 作者: Sameer Sadruddin, Eleni Poupaki, Alex Watkins, Bora Karasulu, Adriaan J. M. Mackus, Erwin Kessels, Sören Auer, Jennifer D'Souza 发布时间: 2026-09-15 a…
论文概要
研究领域: ML 作者: Sameer Sadruddin, Eleni Poupaki, Alex Watkins, Bora Karasulu, Adriaan J. M. Mackus, Erwin Kessels, Sören Auer, Jennifer D'Souza 发布时间: 2026-09-15 arXiv: 2609.12139
中文摘要
原子层沉积（ALD）与原子层刻蚀（ALE）在材料科学的实验与模拟文献中报道方式异构，阻碍了比较与机器可执行的复用。我们提出四个经领域专家评审的 ALD 与 ALE 实验及模拟过程 JSON Schema。这些 schema 借助 schema-miner 整理、以 QUDT 为基础（使用 schema-miner pro），对材料、工艺条件、构型以及实测或预测结果进行结构化。我们比较了它们的范围、结构与语义基础，并演示了其用于模式引导的文献抽取与通过 ORKG 模板发布结构化记录。
原文摘要
Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates.
*自动采集于 2026-09-15*
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